Langmuir-probe measurements of a pulsed and steady-state rf glow-discharge source and of an rf planar-magnetron source
Author:
Publisher
Elsevier BV
Subject
Spectroscopy,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Reference34 articles.
1. Glow Discharge Spectroscopies;Winchester,1993
2. Frequency dependence of ion bombardment of grounded surfaces in rf argon glow discharges in a planar system
3. Comparison of electron‐density measurements made using a Langmuir probe and microwave interferometer in the Gaseous Electronics Conference reference reactor
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4. Development of a Pulsed Radio Frequency Glow Discharge for Three-Dimensional Elemental Surface Imaging. 1. Application to Biopolymer Analysis;Analytical Chemistry;2007-01-23
5. Plasma diagnostics and numerical simulations: insight into the heart of analytical glow discharges;J. Anal. At. Spectrom.;2007
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