Author:
Zhang Haomiao,Gao Ping,Li Xiong,Pu Mingbo,Ma Xiaoliang,Guo Yinghui,Wang Changtao,Zhao Zeyu,Luo Xiangang
Funder
National Key Research and Development Program of China
Youth Innovation Promotion Association
National Natural Science Foundation of China
Subject
Mechanical Engineering,General Materials Science
Reference65 articles.
1. Semiconductor Lithography: Principles, Practices, and Materials;Moreau,2012
2. Role of nanoimprint lithography for strongly miniaturized optical spectrometers;Hillmer;Nanomaterials,2021
3. Lithography technology and trends for More than Moore devices: advanced packaging and MEMS devices;Pizzagalli,2018
4. The future and promise of flat optics: a personal perspective;Capasso;Nanophotonics,2018
5. Recent progress on metasurfaces: applications and fabrication;Yoon;J. Phys. Appl. Phys.,2021
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献