Carbon nitride thin films prepared by a capacitively coupled RF plasma jet-Reference-Cited by-同舟云学术

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Carbon nitride thin films prepared by a capacitively coupled RF plasma jet

Published:1996-12 Issue:1-4 Volume:120 Page:298-302
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Dinescu G.,Aldea E.,Boieriu P.,Musa G.,Andrei A.,Dinescu M.,Brussaard G.J.H.,Severens R.J.,van de Sanden M.C.M.,Schram D.C.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference26 articles.

1. Prediction of New Low Compressibility Solids

2. Low-Compressibility Carbon Nitrides

3. Structural and optical properties of amorphous carbon nitride

4. Crystalline carbon nitride films formation by chemical vapor deposition

5. Properties of carbon nitride thin films prepared by ion and vapor deposition

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1. Ultra-high-rate deposition of diamond-like carbon films using Ar/C₂H₂ plasma jet CVD in combination with substrate-stage discharge;Japanese Journal of Applied Physics;2022-03-25

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3. Operation of a magnetron sputtering gas aggregation cluster source in a plasma jet regime for synthesis of core–shell nanoparticles;Journal of Physics D: Applied Physics;2020-10-15

4. Thermal evolution study of nonmetallic impurities and surface passivation of Cu nanopowders produced via a DC thermal plasma synthesis;Advanced Powder Technology;2016-07

5. Optical Spectroscopic Investigation of Ar/CH3OH and Ar/N2/CH3OH Atmospheric Pressure Plasma Jets;Plasma Science and Technology;2014-02

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