Structure and properties of NbN and TaN films prepared by ion beam assisted deposition
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference8 articles.
1. On the mechanism of crystal growth orientation of ion beam assisted deposited thin films
2. Grain size and recrystallization of TiN, ZrN, NbN, and CrN alloyed and multilayer films
3. X-ray diffractometry analysis of r.f.-sputtered hard coatings based on nitrides of Ti, Cr, Hf
4. Are coatings produced by ion-beam-assisted deposition superior? A comparison of chemical and mechanical properties of steel coated using different deposition techniques
5. Synthesis and properties of tantalum nitride films formed by ion beam assisted deposition
Cited by 37 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Reliability and characteristics of magnetron sputter deposited tantalum nitride for thin film resistors;Thin Solid Films;2018-08
2. Superconducting hot-electron bolometer: from the discovery of hot-electron phenomena to practical applications;Superconductor Science and Technology;2015-12-17
3. Effects of nitrogen composition on the resistivity of reactively sputtered TaN thin films;Surface and Interface Analysis;2014-11-18
4. Effects of Nitrogen Content on the Phase and Resistivity of TaN Thin Films Deposited by Electron Beam Evaporation;JOM;2014-06-19
5. The effect of nitrogen ion implantation on the corrosion resistance and microstructure of tantalum-coated stainless steel;The European Physical Journal Plus;2014-06
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3