Effect of heat treatment on the thermal stability and properties evolution of TiAlPN thin film prepared by reactive HiPIMS
Author:
Funder
OCP Foundation
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
Reference59 articles.
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3. Handbook of Refractory Carbides and Nitrides: Properties, Characteristics, Processing and Applications;Pierson,1996
4. Microstructural and electrochemical comparison between TiN coatings deposited through HIPIMS and DCMS techniques;Elmkhah;J. Alloys Compd.,2018
5. Influence of annealing temperature on the microstructure and hardness of TiN coatings deposited by high-power impulse magnetron sputtering;Ghailane;J. Mater. Eng. Perform.,2022
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