Electrical performance and thermal stability of MIC poly-Si TFTs improved using drive-in nickel induced crystallization
Author:
Funder
Sino American Silicon Products Incorporation
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
Reference22 articles.
1. Polysilicon TFT technology for active matrix OLED displays
2. Low-temperature (
3. Polycrystalline silicon obtained by metal induced crystallization using different metals
4. Effects of longitudinal grain boundaries on the performance of MILC-TFTs
5. Structural and electrical properties of polycrystalline silicon produced by low-temperature Ni silicide mediated crystallization of the amorphous phase
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2. Crystallization of Hydrogenated Amorphous Silicon Thin Films Using Combined Continuous Wave Laser and Thermal Annealing;2023-01-30
3. Passivation of Poly-Si Thin Film Employing Si Self-Implantation and Its Application to TFTs;IEEE Journal of the Electron Devices Society;2018
4. Effect of nickel concentration on source/drain series resistance and channel resistance of Ni-metal-induced crystallization thin-film transistors;Thin Solid Films;2013-10
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