Electron transport in nanocrystalline SiC films obtained by direct ion deposition-Reference-Cited by-同舟云学术

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Electron transport in nanocrystalline SiC films obtained by direct ion deposition

Published:2016-12 Issue: Volume:100 Page:596-604
ISSN:0749-6036
Container-title:Superlattices and Microstructures
language:en
Short-container-title:Superlattices and Microstructures

Author:

Kozlovskyi A.,Semenov A.,Skorik S.

Funder

National Academy of Science of Ukraine

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,General Materials Science

Reference31 articles.

1. Silicon Carbide Microsystems for Harsh Environments;Wijesundara,2011

2. Properties of Silicon Carbide, INSPEC;Harris,1995

3. Silicon carbide for microelectromechanical systems;Mehregany;Int. Mater. Rev.,2000

4. Advances in Silicon Carbide Processing and Applications,2004

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