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Fabrication and RF characterization of zinc oxide based Film Bulk Acoustic Resonator

  • Published:2018-06 Issue: Volume:118 Page:104-115
  • ISSN:0749-6036
  • Container-title:Superlattices and Microstructures
  • language:en
  • Short-container-title:Superlattices and Microstructures

Author:

Patel Raju,Bansal Deepak,Agrawal Vimal Kumar,Rangra Kamaljit,Boolchandani Dharmendar

Funder

Council of Scientific and Industrial and Industrial Research (CSIR) New Delhi

Malaviya National Institute of Technology

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,General Materials Science

Reference29 articles.

1. Micro-electromechanical film bulk acoustic sensor for plasma and whole blood coagulation monitoring;Chen;Biosens. Bioelectron.,2017

2. Design and fabrication of a miniaturized bulk acoustic filter by high aspect ratio etching;Lin;J. Microlithogr. Microfabr. Microsyst.,2005

3. ZnO/ST-Quartz SAW resonator: an efficient NO2gas sensor;Rana;Sensor. Actuator. B Chem.,2017

4. Design and optimization of SHF composite FBAR resonators;Pillai;IEEE Trans. Ultrason. Ferroelectrics Freq. Contr.,2017

5. Improvement of the crystallinity of ZnO thin films and frequency characteristics of a film bulk acoustic wave resonator by using an Ru buffer layer and annealing treatment;Kim;Superlattice. Microst.,2006

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