Process quality control for large-scale silicon sensor productions-Reference-Cited by-同舟云学术

Process quality control for large-scale silicon sensor productions

Published:2019-04 Issue: Volume:924 Page:38-43
ISSN:0168-9002
Container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Author:

Hinger V.,Bergauer T.,Blöch D.,Dragicevic M.,Grossmann J.,König A.,Pree E.,Valentan M.

Funder

Austrian Research Promotion Agency (FFG), AustriaAustrian Research Promotion Agency (FFG), Austria

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference10 articles.

1. The Phase-2 Upgrade of the CMS Tracker, Tech. Rep. CERN-LHCC-2017-009, CMS-TDR-014,2017

2. Technical Design Report for the ATLAS Inner Tracker Strip Detector, Tech. Rep. CERN-LHCC-2017-005, ATLAS-TDR-025,2017

5. Semiconductor Material and Device Characterization;Schroder,2005

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Sensing, Smart and Sustainable Manufacturing Processes;Enabling Systems for Intelligent Manufacturing in Industry 4.0;2021

2. The silicon sensors for the High Granularity Calorimeter of CMS;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2020-10