Micromachined anti-scatter grid fabricated using crystalline wet etching of (110) silicon and metal electroplating for X-ray imaging
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference7 articles.
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3. Fabrication of a 2-D in-plane micro needle array integrated with microfluidic components using crystalline wet etching of (110) silicon;Microsystem Technologies;2015-06-14
4. Micromachined hetero-core anti-scatter grid for a digital X-ray image sensor;Sensors and Actuators A: Physical;2012-10
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