Laser-plasma EUV source dedicated for surface processing of polymers
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference27 articles.
1. A liquid-xenon-jet laser-plasma x-ray and EUV source
2. Liquid-tin-jet laser-plasma extreme ultraviolet generation
3. Studies of high-repetition-rate laser plasma EUV sources from droplet targets
4. Comparative study on emission characteristics of extreme ultraviolet radiation from CO2 and Nd:YAG laser-produced tin plasmas
5. Damage threshold measurements on EUV optics using focused radiation from a table-top laser produced plasma source
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