Author:
Wang Jiajun,Deng Shuai,Zhao Ruikai,Xue Juan,Bai Yadi,Wu Zeqing
Subject
Filtration and Separation,Analytical Chemistry
Reference48 articles.
1. United Nations Climate Change. AM0096: CF4 emission reduction from installation of an abatement system in a semiconductor manufacturing facility --- Version1.0.0. https://cdm.unfccc.int/methodologies/DB/SF95S0OW4343SA06Z6FUUXYD0FFTCT; 2021 (accessed 23 August 2021).
2. CF4 adsorption on porous carbon derived from silicon carbide;Choi;Micropor. Mesopor. Mat.,2020
3. Adsorption isotherms of tetrafluoromethane and hexafluoroethane on various adsorbents;Ahn;J. Chem. Eng. Data,2006
4. Continuous Emission Monitoring of Tetrafluoromethane Using Quantum Cascade Lasers;Geiser;PHOTONICS,2016
5. Adsorption of tetrafluoromethane and nitrogen by various adsorbents;Singh;Sep. Sci. Technol.,2002
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献