Separation of tetramethyl ammonium hydroxide using an MFI-type zeolite-coated membrane-Reference-Cited by-同舟云学术

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Separation of tetramethyl ammonium hydroxide using an MFI-type zeolite-coated membrane

Published:2013-12 Issue: Volume:120 Page:129-133
ISSN:1383-5866
Container-title:Separation and Purification Technology
language:en
Short-container-title:Separation and Purification Technology

Author:

Nishihama Syouhei,Tsutsumi Yasuhiro,Yoshizuka Kazuharu

Publisher

Elsevier BV

Subject

Filtration and Separation,Analytical Chemistry

Reference20 articles.

1. S. Jimi, N. Higuchi, Japan Kokai Tokkyo Koho JP07136651, 1995.

2. A study on reclaimed photoresist developer using an electrodialysis method;Sugawara;Jpn. J. Appl. Phys.,2002

3. Y. Tajima, H. Sugawara, Japan Kokai Tokkyo Koho JP2003-215810, 2003.

4. Recovery of tetra-methyl ammonium hydroxide from waste solution by ion exchange resin;Shibata;Resour. Process.,2006

5. Anaerobic treatment of tetra-methyl ammonium hydroxide (TMAH) containing wastewater;Chang;IEEE Trans. Semicond. Manuf.,2008

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1. Application of an ozone-activated peroxymonosulfate process to effectively degrade tetramethylammonium hydroxide (TMAH) in semiconductor wastewater;Journal of Water Process Engineering;2024-11

2. Application of an Ozone-Activated Peroxymonosulfate Process to Effective Degradation of Tetramethylammonium Hydroxide (Tmah) in Semiconductor Wastewater;2024

3. Treatment technologies and mechanisms for tetramethylammonium hydroxide (TMAH) wastewater from micro-electronic industry: A review;Resources, Conservation and Recycling;2023-07

4. Treatment of Semiconductor Wastewater Containing Tetramethylammonium Hydroxide (TMAH) Using Nanofiltration, Reverse Osmosis, and Membrane Capacitive Deionization;Membranes;2023-03-14

5. A review of the existing and emerging technologies for wastewaters containing tetramethyl ammonium hydroxide (TMAH) and waste management systems in micro-chip microelectronic industries;Chemosphere;2022-11

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