The evolution of stiction repair for microelectromechanical system cantilevers using periodic excitation
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Acoustics and Ultrasonics,Condensed Matter Physics
Reference28 articles.
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3. Mechanical stability and adhesion of microstructures under capillary forces. Part I. Basic theory;Mastrangelo;Journal of Microelectromechanical Systems,1993
4. Mechanical stability and adhesion of microstructures under capillary forces. Part II. Experiments;Mastrangelo;Journal of Microelectromechanical Systems,1993
5. Adhesion hysteresis of silane coated microcantilevers;de Boer;Acta Materialia,2000
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