Phase unwrapping method for point diffraction interferometer based on residual auto encoder neural network

Author:

Zhao Zhuo,Li Bing,Kang Xiaoqin,Lu Jiasheng,Liu Tongkun

Funder

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference30 articles.

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3. Precision optical path alignment system for point diffraction interferometer based on image information;Zhao;Appl Opt,2019

4. Development of the point diffraction interferometer for extreme ultraviolet lithography: design, fabrication, and evaluation;Otaki;J Vac Sci Technol B Microelectron Nanom Struct,2002

5. Advanced point diffraction interferometer for EUV aspherical mirrors;Ota;Emerg Lithogr Technol V,2001

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