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Laser ablation mechanism of silicon nitride with nanosecond and picosecond lasers

  • Published:2019-11 Issue: Volume:119 Page:105644
  • ISSN:0030-3992
  • Container-title:Optics & Laser Technology
  • language:en
  • Short-container-title:Optics & Laser Technology

Author:

Soltani B.,Azarhoushang B.,Zahedi A.

Funder

Albert-Ludwigs-Universität Freiburg

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference37 articles.

1. Handbook of advanced ceramics: Materials, applications, processing, and properties;Sōmiya,2013

2. Laser-Assisted Grinding of Ceramics;Marinescu,2007

3. Wear of diamond grinding wheels and material removal rate of silicon nitrides under different machining conditions;Li;Mater. Lett.,2007

4. Review: various methods of machining advanced ceramic materials;Tuersley;J. Mater. Process. Technol.,1994

5. Residual stress development in laser machined PVD-coated carbide cutting tools;Breidenstein;MSF,2013
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