A method for measuring and correcting errors in the thickness of semiconductor thin films based on reflection spectroscopy fitting technology
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference34 articles.
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4. Effect of film thickness on the thermal resistance of confined semiconductor thin films;Landry;J Appl Phys,2010
5. Impact of film thickness of organic semiconductor on off-state current of organic thin film transistors;Nurul Islam;J Appl Phys,2011
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