Versatile femtosecond laser interference patterning applied to high-precision nanostructuring of silicon
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Published:2024-12
Issue:
Volume:179
Page:111360
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ISSN:0030-3992
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Container-title:Optics & Laser Technology
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language:en
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Short-container-title:Optics & Laser Technology
Author:
Solana IreneORCID,
Chacon-Sanchez Fernando,
Garcia-Lechuga Mario,
Siegel JanORCID
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