Ablation depth control with 40 nm resolution on ITO thin films using a square, flat top beam shaped femtosecond NIR laser-Reference-Cited by-同舟云学术

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Ablation depth control with 40 nm resolution on ITO thin films using a square, flat top beam shaped femtosecond NIR laser

Published:2016-09 Issue: Volume:84 Page:44-50
ISSN:0143-8166
Container-title:Optics and Lasers in Engineering
language:en
Short-container-title:Optics and Lasers in Engineering

Author:

Kim Hoon-Young^ORCID,Yoon Ji-Wook,Choi Won-Suk,Kim Kwang-Ryul,Cho Sung-Hak

Funder

Center for Advanced Meta-Materials(CAMM)

Ministry of Science, ICT and Future Planning

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. Sub-100nm structuring of indium-tin-oxide thin films by sub-15 femtosecond pulsed near-infrared laser light;Afshar;Opt Lett,2012

2. Fabrication of micro/nano crystalline ITO structures by femtosecond laser pulses;Cheng;Appl Phys A,2010

3. Microstructure and etching properties of sputtered indium-tin oxide (ITO);Hoheisel;Phys Stat Sol,1991

4. Laser patterning with beam shaping on indium tin oxide thin films of glass/plastic substrate;Chen;Thin Solid Films,2009

5. Femtosecond laser patterning of Ta0.1W0.9Ox/ITO thin film stack;Lee;Appl Surf Sci,2007

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1. Morphological study of depth-controlled high quality holes and lines fabricated on a metal substrate with a thin metal film by picosecond laser pulses;Optics & Laser Technology;2024-08

2. Recent advances of light-field modulated operation in laser-induced breakdown spectroscopy;Frontiers of Physics;2024-07-26

3. Comparison of Characteristics of Drilled Holes Using a Gaussian Beam and a Flat-top Beam in Laser Perforation;2024 Photonics & Electromagnetics Research Symposium (PIERS);2024-04-21

4. Minimizing Defect on Ti Thin Film Laser Ablation using Square Flat-top NIR Femtosecond Laser for Thin Film Transistor of µ-LED Repair;Journal of Laser Micro/Nanoengineering;2023-11

5. Fabrication of depth-controlled high-quality holes and lines on a metal surface by nanosecond laser pulses at 1064 nm;The International Journal of Advanced Manufacturing Technology;2023-09-27

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