Analysis of stresses and shape changes in thin substrates with stressed film patterning using femtosecond laser micromachining

Author:

Zuo Heng E.ORCID,Heilmann Ralf K.ORCID,Schattenburg Mark L.ORCID

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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