On the effectiveness of lateral excitation of shear modes in AlN layered resonators-Reference-Cited by-同舟云学术

On the effectiveness of lateral excitation of shear modes in AlN layered resonators

Published:2014-08 Issue:6 Volume:54 Page:1504-1508
ISSN:0041-624X
Container-title:Ultrasonics
language:en
Short-container-title:Ultrasonics

Author:

Clement M.,Iborra E.,Olivares J.,DeMiguel-Ramos M.,Mirea T.,Sangrador J.

Publisher

Elsevier BV

Subject

Acoustics and Ultrasonics

Reference27 articles.

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3. Viscosity sensor using ZnO and AlN thin film bulk acoustic resonators with tilted polar c-axis orientations;Qin;J. Appl. Phys.,2011

4. AlN-based sputter-deposited shear mode thin film bulk acoustic resonator (FBAR) for biosensor applications – a review;Wingqvist;Surf. Coat. Technol.,2010

5. Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review;Fu;Sens. Actuators B,2010

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