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Lumped element modeling of air-coupled capacitive micromachined ultrasonic transducers with annular cell geometry

  • Published:2017-04 Issue: Volume:76 Page:19-27
  • ISSN:0041-624X
  • Container-title:Ultrasonics
  • language:en
  • Short-container-title:Ultrasonics

Author:

Na Shuai,Wong Lawrence L.P.,Chen Albert I.H.,Li Zhenhao,Macecek Mirek,Yeow John T.W.

Funder

Natural Sciences and Engineering Research Council of Canada

CMC Microsystems

Techno Scientific Inc

Publisher

Elsevier BV

Subject

Acoustics and Ultrasonics

Reference27 articles.

1. Ultrasonic Measurements for Process Control: Theory, Techniques, Applications;Lynnworth,2013

2. NDE applications of air-coupled ultrasonic transducers;Grandia,1995

3. Air-coupled ultrasound-a millennial review;Buckley,2000

4. Applications of airborne ultrasound in human-computer interaction;Dahl;Ultrasonics,2014

5. Noncontact ultrasound imaging applied to cortical bone phantoms;Bulman;Med. Phys.,2012

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1. Air-coupled capacitive micromachined transducer array for non-contact Lamb wave detection;Sensors and Actuators A: Physical;2023-06

2. Capacitive Micromachined Ultrasonic Transducer Array for Air-coupled Lamb Wave Detection of Plate Structure;2022 IEEE International Ultrasonics Symposium (IUS);2022-10-10

3. Effect of Tapered Angle on BAW Transducer Performance for Ultrasonic Wavefront Computing;2022 IEEE International Ultrasonics Symposium (IUS);2022-10-10

4. Piston-Mode pMUT With Mass Load;IEEE Journal of the Electron Devices Society;2022

5. Design and analysis of CMUT device using COMSOL for Radio frequency applications;Materials Today: Proceedings;2022
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