Design, Modelling and Fabrication of a 40-330 Hz Dual-Mass MEMS Gyroscope on Thick-SOI Technology

Author:

Rajaraman V.,Sabageh I.,French P.,Pandraud G.,Cretu E.

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference7 articles.

1. W.T. Ang, P.K. Khosla, C.N. Riviere, Design of all-accelerometer inertial measurement unit for tremor sensing in hand-held microsurgical instrument, Proc. IEEE Int. Conf. on Robotics & Automation (ICRA’03), Taipei, Taiwan, 2003, pp. 1781-1786.

2. I. Sabageh, Design and modeling of decoupled and tunable bandwidth (40-330Hz) MEMS vibratory gyroscopes, MSc Thesis, Delft University of Technology (TU Delft), The Netherlands, 2010.

3. V. Rajaraman, On integrated process development for SOI-MEMS inertial devices, Technical Report, NXP Semiconductors B.V., Nijmegen, The Netherlands, 2007. (unpublished).

4. C. Acar, A.M. Shkel, MEMS vibratory gyroscopes: structural approaches to improve robustness, New York: Springer; 2009.

5. S.E. Alper, MEMS gyroscopes for tactical-grade inertial measurement applications, PhD Thesis, Middle East Technical University (METU), Turkey, 2005.

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