Selective Stiffening for Producing Motion Conversion Mechanisms

Author:

Hotzen Inbar,Ternyak Orna,Shmulevich Shai,Elata David

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference13 articles.

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3. Infrared micro-spectrometer based on a diffraction grating;Kong;S&A A: Physical,2001

4. High-resolution, high-speed microscanner in single-crystalline silicon actuated by self- aligned dual-mode vertical electrostatic combdrive with capability for phased array operation;Lee,2003

5. Vertical-actuated electrostatic comb drive with in situ capacitive position correction for application in phase shifting diffraction interferometry;Lee;IEEE-JMEMS,2003

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1. High Sensitivity Mems Z-Axis Accelerometer with In-Plane Differential Readout;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

2. Non-linear mechanics in resonant inertial micro sensors;International Journal of Non-Linear Mechanics;2020-04

3. Hardening, Softening, and Linear Behavior of Elastic Beams in MEMS: An Analytical Approach;Journal of Microelectromechanical Systems;2019-04

4. Selective Stiffening for Producing a Mass-Fabrication Compatible Motion Conversion Mechanism;Journal of Microelectromechanical Systems;2015-12

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