Surface-micromachined Bragg Reflectors Based on Multiple Airgap/SiO2 Layers for CMOS-compatible Fabry-perot Filters in the UV-visible Spectral Range
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics
Reference5 articles.
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3. Optical transmission performance of a surface-micromachined Fabry–Pérot interferometer for thermal infrared;Tuohiniemi;Journal of Micromechanics and Microengineering,2012
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