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Ablation characteristics of femtosecond laser processing for nanometer-sized ceramic films

  • Published:2017-08 Issue: Volume:43 Page:S573-S577
  • ISSN:0272-8842
  • Container-title:Ceramics International
  • language:en
  • Short-container-title:Ceramics International

Author:

Tsai Yu-Hsiang,Chen Bor-Chyuan,Ho Ching-Yen,Chiou Yu-Jia,Chen Kuen-Hau,Chen Cheng-Sao,Wen Mao-Yu

Funder

Hwa Hsia University of Technology

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Ultrafast laser ablation characteristics of PZT ceramic: analysis methods and comparison with metals;Di Maio;Opt. Lasers Eng.,2012

2. Laser machining of structural ceramics – a review;Samant;J. Eur. Ceram. Soc.,2009

3. Different microstructure and dielectric properties of Ba1−xCaxTiO3 ceramics and pulsed-laser-ablated films;Cheng;Mater. Res. Bull.,2007

4. Photomechanical ablation of 304L stainless steel, aluminum oxide (Al2O3) thin film, and pure silicon;Rosa-Santana;Opt. Photonics J.,2016

5. Temperature dependent mechanical property of PZT film: an investigation by nanoindentation;Li;PLoS ONE,2015

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