Author:
Li Jian,Jiang Yonggang,Li Hongchang,Liang Xiaobo,Huang Manguo,Liu Defeng,Zhang Deyuan
Funder
National Key Basic Research Program of China
Subject
Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference26 articles.
1. Silicon carbide MEMS for harsh environments;Mehregany;Proc. IEEE,1998
2. Silicon carbide as a new MEMS technology;Sarro;Sens. Actuators A Phys.,2000
3. Silicon carbide as a mechanical material;Krotz,2005
4. SiC technologies for future energy electronics;Kimoto;Dig. Tech. Pap. - Symp. VLSI Technol.,2010
5. Silicon Carbide Microsystems for Harsh Environments;Wijesundara,2011
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