New achievement of the global sheath-bulk model for the collisionless radio-frequency using in scale industries-Reference-Cited by-同舟云学术

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New achievement of the global sheath-bulk model for the collisionless radio-frequency using in scale industries

Published:2022-12 Issue:12 Volume:8 Page:e12264
ISSN:2405-8440
Container-title:Heliyon
language:en
Short-container-title:Heliyon

Author:

Elgendy A.T.^ORCID,Alyousef Haifa A.,Ahmed Kamal M.^ORCID

Publisher

Elsevier BV

Subject

Multidisciplinary

Reference21 articles.

1. Soviet Radio Frequency Discharge Research;Godyak,1986

2. Comparison of a consistent theory of radio frequency sheaths with step models;Gierling;J. Appl. Phys.,1998

3. Analytical solution for capacitive RF sheath;Lieberman;IEEE Trans. Plasma Sci.,1988

4. Dynamics of a collisional, capacitive rf sheath;Lieberman;IEEE Trans. Plasma Sci.,1989

5. The Bohm criterion and sheath formation;Riemann;J. Phys. D, Appl. Phys.,1991

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The effect of the electron κ-distribution on the dust particle charging in the radio-frequency thermal-sheaths;Physica Scripta;2024-07-22

2. Fluid models calculation of Ar/CF₄ radiofrequency capacitively coupled plasmas;Physica Scripta;2024-07-15

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