The surface characterization of the atmospheric contamination of hydrogenated amorphous silicon
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference28 articles.
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5. Compositional characterization of microwave plasma a-Si: H films
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Tensiometry and Auger electron spectroscopy studies of the surface of plasma-deposited silicon carbide coatings;Thin Solid Films;1992-09
2. Ultraviolet photoelectron spectroscopic study of the surface etching of air-oxidized hydrogenated amorphous silicon by aqueous hydrofluoric acid solution;Applied Surface Science;1992-01
3. Silicon-carbon reaction provoked by the sputter cleaning of lightly contaminated crystalline silicon;Applied Surface Science;1991-10
4. Kinetics of the room-temperature air oxidation of hydrogenated amorphous silicon and crystalline silicon;Philosophical Magazine B;1988-10
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