Design and use of a vacuum system for high rate reactive sputtering of TiO2/TiN/TiO2 solar control films
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference11 articles.
1. Pressure stability in reactive magnetron sputtering
2. Vacuum Technology;Carpenter,1983
3. The design and performance of planar magnetron sputtering cathodes
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