A silicon micromachined conductometric gas sensor with a maskless Pt sensing film deposited by selected-area CVD-Reference-Cited by-同舟云学术

A silicon micromachined conductometric gas sensor with a maskless Pt sensing film deposited by selected-area CVD

Published:1996-10 Issue:1-3 Volume:36 Page:312-319
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Majoo Sanjeev,Gland J.L.,Wise K.D.,Schwank J.W.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference8 articles.

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3. Ultra thin-film gas detector;Johnson,1990

4. Integrated ultra-thin film gas sensors;Johnson;Sensors and Actuators B,1994

5. A micromachined ultrathin-film gas detector;Najafi;IEEE Trans. Electron. Devices,1994

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