Modulated operating temperature for MOSFET gas sensors: hydrogen recovery time reduction and gas discrimination

Author:

Briand Danick,Wingbrant Helena,Sundgren Hans,van der Schoot Bart,Ekedahl Lars-Gunnar,Lundström Ingemar,de Rooij Nicolaas F

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference29 articles.

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2. R.P. Lyle, H.G. Hughes, D. Walters, Micromachined silicon CO gas sensors, in: Conference Proceedings of 191st ECS Meeting, Microstructured and Microfabricated Systems III, Montréal, Que., Canada, 4–7 May, 1997, pp. 188–198.

3. Gas identification by modulating temperatures of SnO2-based thick film sensors;Heilig;Sens. Actuators B,1997

4. Very low-power consumption micromachined CO sensors;Faglia;Sens. Actuators B,1999

5. Optimization of temperature programmed sensing for gas identification using micro-hotplate sensors;Kunt;Sens. Actuators B,1998

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