Theory and experiments on r.f. sputtered tin oxide thin-films for gas sensing applications

Author:

Tang Zhenan,Jiang Guoping,Chan Philip C.H.,Sin Johnny K.O.,Lau Silvanus S.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. An Integrated Tin Dioxide Gas Sensor with An Improved Micro-Hotplate;Tang,1995

2. Properties of reactively sputtered tin oxide films as CO gas sensors;DiGiulio;Sensors and Actuators B,1995

3. Thin films for gas sensors;Lalauze;Sensors and Actuators B,1991

4. Undoped and Pd-doped SnO2 thin-films for gas sensors;Gautheron;Sensors and Actuators B,1993

5. Electronic structure of tin oxides/ high-resolution study of XPS and auger spectra;Kover;Surf. Interface Anal.,1995

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