Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon
Author:
Funder
National Natural Science Foundation of China
Publisher
Elsevier BV
Subject
Multidisciplinary
Reference31 articles.
1. Weakening of the anisotropy of surface roughness in ultra-precision turning of single-crystal silicon;Wang;Chin J Aeronaut,2015
2. Fracture of silicon: influence of rate, positioning accuracy, fib machining, and elevated temperatures on toughness measured by pillar indentation splitting;Lauener;Mater Des,2018
3. Diamond machining of silicon: a review of advances in molecular dynamics simulation;Goel;Int J Mach Tools Manuf,2015
4. Subsurface damage and phase transformation in laser-assisted nanometric cutting of single crystal silicon;Chen;Mater Des,2020
5. A comprehensive review of electric discharge machining of advanced ceramics;Ming;Ceram Int,2020
Cited by 30 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Surface/subsurface damage mechanisms and inhibition strategies in machining of hard and brittle materials: a systematic review;Surfaces and Interfaces;2024-09
2. Wettability, droplet impact and anti-icing performance of micro-nano hierarchical structure on Ti6Al4V surface via integrating of chemical modification and laser-induced plasma micromachining;Surface and Coatings Technology;2024-06
3. Progress in applications of laser induced cavitation on surface processing;Optics & Laser Technology;2024-03
4. 基于磁场调控微波等离子体的发射光谱特性研究;Acta Optica Sinica;2024
5. Application of Microwave-Metal Discharge for Metallic Material Removal;Composites Science and Technology;2024
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3