AES depth profiling of thermally treated Al/Si thin-film structures
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference17 articles.
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3. Massalski TM. Binary alloy phase diagrams, 2nd ed. Ohio: ASM International, 1990. p. 211.
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5. Interfacial reactions in dynamically heated Si/Me/Si sandwich layers
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