Author:
Ait-Izem Tarek,Harkat M-Faouzi,Djeghaba Messaoud,Kratz Frédéric
Subject
Industrial and Manufacturing Engineering,Computer Science Applications,Modelling and Simulation,Control and Systems Engineering
Reference34 articles.
1. Development and benchmarking of multivariate statistical process control tools for a semiconductor etch process;Gallagher;Proceedings, Banff, Canada,1997
2. Statistical process monitoring: basics and beyond;Qin;J. Chemom.,2003
3. Non-linear principal component analysis using auto associative neural networks;Kramer;AIChE J.,1991
4. Nonlinear component analysis as a kernel eigenvalue problem;Schokopf;Neural Comput.,1998
5. Recursive PCA for adaptive process monitoring;Li;J. Process Control,2000
Cited by
49 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献