1. “Report of the WECC interlaboratory comparison M13—Surface roughness,” 1993, PTB-DKD
2. ISO 11562-1996, Geometrical product specifications (GPS)—Surface texture: Profile method—Metrological characteristics of phase correct filters, ISO, Geneva
3. ISO 3274-1996 Geometrical product specifications—Surface texture: Profile method—Nominal characteristics of contact (stylus) instruments, ISO, Geneva
4. Subnanometer behavior of a capacitive feedback, piezoelectric displacement actuator;Harb;Rev Sci Instrum,1992
5. Dynamic probe calibration in the μm region with nanometric accuracy;Haitjema;Prec Eng,1996