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Piezoelectric MEMS Technologies

  • Published:2017 Issue: Volume: Page:533-574
  • ISSN:
  • Container-title:Advanced Piezoelectric Materials
  • language:
  • Short-container-title:

Author:

Korobova N.

Publisher

Elsevier

Reference96 articles.

1. Design and simulation of MEMS based piezoresistive pressure sensor for enhanced sensitivity;Ghosh,2013

2. Energy harvesting and remote powering for implantable biosensors;Olivo;IEEE Sensors J,2011

3. Valuation on MEMS pressure sensors and device applications;Md Yunus;Int J Electr Comp Energ Electron Commun Eng,2015

4. Investigation on MEMS-based piezoelectric energy harvester design with aspect of autonomous automobile sensors;Bhuyan;Asian J Sci Res,2013

5. Nanotechnology in electronics,2015

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1. Research of Microwave Radiation Absorption of FDM Printing Materials;2023 Seminar on Microelectronics, Dielectrics and Plasmas (MDP);2023-11-20

2. Research of Low-Cost Technological Process for Manufacturing of One Side Silicon Interposer;2023 Seminar on Microelectronics, Dielectrics and Plasmas (MDP);2023-11-20

3. Microwave Properties of Ba-Substituted Pb(Zr0.52Ti0.48)O3 after Chemical Mechanical Polishing;ECS Journal of Solid State Science and Technology;2023-09-01

4. Poling direction-driven tuning of piezoelectric properties of ferroelectric materials: an experimental study;Journal of the Australian Ceramic Society;2022-07-11

5. Bionic MEMS for Touching and Hearing Sensations: Recent Progress, Challenges, and Solutions;Journal of Bionic Engineering;2022-02-16
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