Atomic Layer Deposition
Author:
Funder
Academy of Finland
Publisher
Elsevier
Reference164 articles.
1. Industrial Applications of Atomic Layer Deposition
2. Chemical Vapour Deposition: Precursors, Processes and Applications;Ritala,2008
3. Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
4. Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends
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