1. Intel enters the third dimension;Cartwright;Nature,2001
2. FinFET—a self-aligned double-gate MOSFET scalable to 20 nm;Hisamoto;IEEE Trans. Electron Devices,2000
3. The challenges of advanced CMOS process from 2D to 3D;Radamson;Appl. Sci.,2017
4. Microelectronic Devices;Yang,1988
5. Moore's Law: the future of Si microelectronics;Thompson;Mater. Today,2006