Anchor deformations drive limit cycle oscillations in interferometrically transduced MEMS beams

Author:

Blocher David,Zehnder Alan T.,Rand Richard H.,Mukerji Shreyasi

Publisher

Elsevier BV

Subject

Applied Mathematics,Computer Graphics and Computer-Aided Design,General Engineering,Analysis

Reference21 articles.

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5. Measurement of nanomechanical resonant structures in single crystal silicon;Carr;J. Vac. Sci. Technol. B,1998

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