Geometrically non-linear analysis of thin-film compliant MEMS via shell and solid elements
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics,Computer Graphics and Computer-Aided Design,General Engineering,Analysis
Reference20 articles.
1. Compliant Mechanisms;Howell,2001
2. Piezoresistive feedback control of a MEMS thermal actuator;Messenger;J. Microelectromech. Syst.,2009
3. A tristable mechanism configuration employing orthogonal compliant mechanisms;Chen;J. Mech. Robotics,2010
4. Evaluating three-dimensional effects on the behavior of compliant bistable micromechanisms;Cherry;J. Micromech. Microeng.,2008
5. A MEMS-based evaluation of the mechanical properties of metallic thin films;Reddy;J. Microelectromech. Syst.,2007
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