Crystallography and structural evolution of cubic boron nitride films during bias sputter deposition
Author:
Publisher
Elsevier BV
Subject
Metals and Alloys,Polymers and Plastics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference46 articles.
1. The Microstructure of Boron Nitride Thin Films
2. Electron optical characterization of cubic boron nitride thin films prepared by reactive ion plating
3. Phase evolution in boron nitride thin films
4. Evidence for rhombohedral boron nitride in cubic boron nitride films grown by ion-assisted deposition
5. Microstructure of cubic boron nitride thin films grown by ion‐assisted pulsed laser deposition
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