PMMA-based resists for a spectral range near 13nm-Reference-Cited by-同舟云学术

PMMA-based resists for a spectral range near 13nm

Published:2000-06 Issue:1-2 Volume:448 Page:487-492
ISSN:0168-9002
Container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Author:

Bulgakova S.A,Lopatin A.Ya,Luchin V.I,Mazanova L.M,Molodnjakov S.A,Salashchenko N.N

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference7 articles.

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5. Aninsitustudy of dissolution and swelling behavior of poly‐(methyl methacrylate) thin films in solvent/nonsolvent binary mixtures

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