Electromechanical energy converters of micromechanic devices on the basis of ferroelectric films
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference8 articles.
1. Large-scale use of ferroelectricity in microelectronics is reality
2. Ferroelectric films: Peculiarities in their application to construction of new generations of memory devices
3. Prospects of the employment of synchrotron radiation in film electrostatic actuator technology
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