Sputtering effects in hexagonal silicon carbide
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference23 articles.
1. Sputtering Yields of Several Semiconducting Compounds under Argon Ion Bombardment
2. Measurement of erosion yields for a SiC surface on H+, D+ and Ar+ bombardment
3. Sputtering process of a silicon carbide surface with energetic ions by means of an AES-SIMS-FDS combined system
4. Application of AES-SIMS (IMA)-FDS combined systems to physical and chemical sputtering processes of graphite and silicon carbide surfaces with energetic ions
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