Dry etching damage of silicon: A review-Reference-Cited by-同舟云学术

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Dry etching damage of silicon: A review

Published:1989-10 Issue:1-4 Volume:4 Page:441-450
ISSN:0921-5107
Container-title:Materials Science and Engineering: B
language:en
Short-container-title:Materials Science and Engineering: B

Author:

Oehrlein Gottlieb S.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference80 articles.

1. Plasma Etching and Reactive Ion Etching;Coburn,1982

2. The design of plasma etchants

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