Enhanced thermal donor formation and oxygen diffusion in silicon exposed to a hydrogen plasma
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference17 articles.
1. Mechanism of the Formation of Donor States in Heat-Treated Silicon
2. Oxygen‐related thermal donors in silicon: A new structural and kinetic model
3. Diffusivity of oxygen in silicon at the donor formation temperature
4. Enhanced Oxygen Diffusion in Silicon at Low Temperatures
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