Deposition and characterization of TiNi-base thin films by sputtering-Reference-Cited by-同舟云学术

Deposition and characterization of TiNi-base thin films by sputtering

Published:2000-01 Issue:1-2 Volume:277 Page:11-17
ISSN:0921-5093
Container-title:Materials Science and Engineering: A
language:en
Short-container-title:Materials Science and Engineering: A

Author:

Chu J.P,Lai Y.W,Lin T.N,Wang S.F

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference20 articles.

1. S. Miyazaki, K. Otsuka, ISIJ Int. 29 (1989) 353.

2. A. Ishida, A. Takei, S. Miyazaki, Thin Solid Films 228 (1993) 210.

3. S. Miyazaki, K. Nomura, in: Proceedings of IEEE Micro Electro Mechanical Systems (MEMS-94), Oiso, Japan, 1994, p. 176.

4. S. Miyazaki, A. Ishida, A. Takei, in: Proceedings of the International Symposium on Measurement and Control in Robotics (ISMCR-92), Tsukuba, Japan, 1992, p. 495.

5. S. Miyazaki, T. Hashinaga, K. Yumikura, Smart Materials SPIE 2442 (1995) 156.

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