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Synthesis and structural analysis of Mo/B periodical multilayer X-ray mirrors for beyond extreme ultraviolet optics

  • Published:2021-01 Issue: Volume:198 Page:109318
  • ISSN:0264-1275
  • Container-title:Materials & Design
  • language:en
  • Short-container-title:Materials & Design

Author:

Penkov Oleksiy V.,Kopylets Igor A.,Kondratenko Valeriy V.,Khadem Mahdi

Funder

Zhejiang University

University of Illinois

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference36 articles.

1. Trends in Processor Architecture in Harnessing Performance Variability / Embedded and High-Performance Many/Multi-Core Platforms;González,2019

2. Summarizing CPU and GPU Design Trends with Product Data;Sun,2019

3. Special section guest editorial: EUV lithography for the 3-nm node and beyond;Bakshi;J. Micro/Nanolith. MEMS MOEMS,2017

4. EUV lithography: state-of-the-art review;Fu;J. Microelectron. Manuf.,2019

5. A 6.7-nm beyond EUV source as a future lithography source;Otsuka;SPIE Adv. Lithograp.,2012

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